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Constant voltage electromigration for advanced BEOL copper interconnects.
Baojun Tang
Kris Croes
Nicolas Jourdan
Jürgen Bömmels
Zsolt Tokei
Ingrid De Wolf
Eric Wilcox
Timothy McMullen
Published in:
IRPS (2015)
Keyphrases
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high voltage
input output
fiber optic
thin film
transmission line
artificial intelligence
database
data sets
operating conditions
low voltage
short circuit