Characterization of high pressure hydrogen annealing effect on polysilicon channel field effect transistors using isothermal deep level trap spectroscopy.
Manh-Cuong NguyenAn Hoang-Thuy NguyenJae-Won ChoiSoo-Yeun HanJung-Yeon KimRino ChoiChanghwan ChoiPublished in: ICICDT (2016)