Login / Signup

As epilayers on (0 0 1)GaAs by low pressure metalorganic chemical vapor deposition.

Qi WangXiaomin RenHui HuangYongqing HuangShiwei Cai
Published in: Microelectron. J. (2009)
Keyphrases
  • chemical vapor deposition
  • thin film
  • high levels
  • computer vision
  • real time
  • high density
  • gallium arsenide