Overlapping-aware throughput-driven stencil planning for E-beam lithography.

Jian Kuang Evangeline F. Y. Young

Published in: ICCAD (2014)

Keyphrases

electron beam
electron beam lithography
response time
planning problems
motion planning
database
heuristic search
decision support
stochastic domains
genetic algorithm
information systems
search algorithm
x ray
mixed initiative
planning process
reinforced concrete