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The P300: A system for automatic patterned wafer inspection.
Byron Dom
Virginia H. Brecher
Raymond Bonner
John S. Batchelder
Robert S. Jaffe
Published in:
Mach. Vis. Appl. (1988)
Keyphrases
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defect detection
semi automatic
fully automatic
wide range
multiresolution
semiconductor manufacturing
real time
real world
information systems
metadata
learning environment
natural language
preprocessing
lower bound
quality control
automatic inspection