Data-driven multi-objective optimization with neural network-based sensitivity analysis for semiconductor devices.
Min-Hye OhKitae LeeSihyun KimByung-Gook ParkPublished in: Eng. Appl. Artif. Intell. (2023)
Keyphrases
- sensitivity analysis
- multi objective optimization
- data driven
- semiconductor devices
- multi objective
- evolutionary algorithm
- electron beam
- neural network
- managerial insights
- multi objective optimization problems
- differential evolution
- bi objective
- multi objective genetic algorithm
- influence diagrams
- variational inequalities
- nsga ii
- multiple objectives
- genetic algorithm
- pareto optimal
- fitness function
- decision variables
- decision problems
- complex optimization problems