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Evaluating the reliability level of virtual metrology results for flexible process control: a novelty detection-based approach.
Pilsung Kang
Dongil Kim
Sungzoon Cho
Published in:
Pattern Anal. Appl. (2014)
Keyphrases
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process control
novelty detection
product quality
control system
text filtering
anomaly detection
intelligent control
semiconductor manufacturing
manufacturing process
concept drift
sentence level
data structure
image analysis
database systems
single view
graduate education