Silicon Nanophotonics Fabrication: An innovative graduate course.
Lukas ChrostowskiNicolas RougerDan DeptuckNicolas A. F. JaegerPublished in: ICT (2010)
Keyphrases
- high density
- nano scale
- plasma etching
- semiconductor devices
- enabling technologies
- high speed
- computer science
- low density
- silicon on insulator
- low cost
- integrated circuit
- undergraduate students
- magnetic recording
- field effect transistors
- electron beam
- thin film
- machine learning
- information systems
- artificial intelligence