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Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching.
Li Wen
Hongjiang Zeng
Zheng Yuan
Jiaru Chu
Hai Wang
Published in:
NEMS (2011)
Keyphrases
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plasma etching
image processing
website
simulation model
numerical simulations
geometric structure
discrete event simulation
databases
data mining
three dimensional
wireless sensor networks
degrees of freedom
high density
thin film
high fidelity
low density