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A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET).
Wendi Gao
Libo Zhao
Zhuangde Jiang
Yong Xia
Xin Guo
Zhiming Zhao
Yulong Zhao
Dong Sun
Published in:
NEMS (2017)
Keyphrases
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gate array
field effect transistors
low power
steady state
high density
mathematical analysis
schottky barrier
logic circuits
low cost
neural network
dynamic programming
power consumption
real time
data warehouse
inverted pendulum