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Recent progress in ion beam fabrication of integrated optical elements.
I. Bányász
G. U. L. Nagy
V. Havranek
V. Vosecek
Emil Agócs
Miklos Fried
V. Rakovics
Stefano Pelli
Published in:
ICTON (2017)
Keyphrases
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electron beam
integrated circuit
x ray
electron beam lithography
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