Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches.
A. BelarniMohamed LamhamdiPatrick PonsLaurent BoudouJ. GuastavinoY. SeguiGeorge J. PapaioannouRobert PlanaPublished in: Microelectron. Reliab. (2008)
Keyphrases
- radio frequency
- image analysis
- relevance feedback
- high resolution
- database
- high throughput
- confocal images
- fluorescence microscopy
- reliability analysis
- digital forensics
- highly reliable
- multiresolution
- evolutionary algorithm
- artificial neural networks
- data structure
- feature extraction
- information retrieval
- real time