Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor.
Wenjie HeHai-Tao ZhangZhiyong ChenBo ChuKun CaoBin ShanRong ChenPublished in: IEEE Trans. Control. Syst. Technol. (2015)
Keyphrases
- predictive control
- heat exchanger
- control scheme
- neuro fuzzy
- model predictive control
- control strategy
- multiple models
- control method
- multi layer
- chemical vapor deposition
- power plant
- thin film
- operating conditions
- dissolved oxygen
- control law
- rf sputtering
- fuzzy rules
- room temperature
- fuzzy control
- knowledge base
- data mining
- real time