Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook.
Claude YugmaJakey BlueStéphane Dauzère-PérèsAli ObeidPublished in: J. Sched. (2015)
Keyphrases
- semiconductor manufacturing
- process control
- control system
- discrete event simulation
- intelligent control
- product quality
- scheduling problem
- manufacturing process
- scheduling algorithm
- data integration
- dynamic scheduling
- resource constraints
- artificial intelligence
- response time
- production system
- round robin
- job shop