Adaptive parametric yield enhancement via collinear multivariate analytics for semiconductor intelligent manufacturing.
Chen-Fu ChienChia-Cheng ChenPublished in: Appl. Soft Comput. (2021)
Keyphrases
- adaptive systems
- semiconductor manufacturing
- image processing
- adaptive learning
- image enhancement
- wafer fabrication
- data driven
- manufacturing systems
- case study
- multivariate data
- learning analytics
- computer integrated manufacturing
- manufacturing processes
- quality control
- line segments
- hough transform
- data management
- decision making
- contrast enhancement
- intelligent systems
- predictive modeling
- production line
- expert systems
- data analysis
- manufacturing environment
- kernel density estimators
- data mining