Real-time virtual metrology and control of etch rate in an industrial plasma chamber.
Shane A. LynnNiall MacGearailtJohn V. RingwoodPublished in: CCA (2012)
Keyphrases
- real time
- control system
- process control
- real time control
- manufacturing process
- data acquisition
- diesel engine
- control signals
- interactive virtual
- low cost
- human machine interface
- virtual environment
- industrial applications
- neural network
- control method
- augmented reality
- virtual reality
- case study
- closed loop
- digital signal processor
- high speed
- vision system
- virtual world
- control loop
- visual feedback
- virtual teams
- quality of service
- real environment
- high fidelity
- thin film
- camera calibration
- changing environment
- single view