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Shane A. Lynn
Publication Activity (10 Years)
Years Active: 2012-2012
Publications (10 Years): 0
Top Topics
Changing Environment
Control Loop
Manufacturing Process
Thin Film
Top Venues
CCA
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Publications
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Shane A. Lynn
,
Niall MacGearailt
,
John V. Ringwood
Real-time virtual metrology and control of etch rate in an industrial plasma chamber.
CCA
(2012)