Particle filtering of hidden Gamma processes for robust Predictive Maintenance in semiconductor manufacturing.
Andrea SchirruSimone PampuriGiuseppe De NicolaoPublished in: CASE (2010)
Keyphrases
- particle filtering
- semiconductor manufacturing
- visual tracking
- particle filter
- tracking framework
- kalman filtering
- human motion capture
- discrete event simulation
- object tracking
- partial occlusion
- bayesian filtering
- appearance model
- kalman filter
- mean shift
- ego motion estimation
- importance sampling
- state estimation
- process control
- video tracking
- hand tracking
- conditional density
- human body tracking
- contour tracking
- multiple targets
- dynamic bayesian networks
- d objects
- proposal distribution
- robust object tracking
- spatio temporal
- feature extraction