Self-Adaptive Plasma Chemistry and Intelligent Plasma Medicine.

Li Lin Dayun Yan Taeyoung Lee Michael Keidar

Published in: Adv. Intell. Syst. (2022)

Keyphrases

chemical reactions
high energy
thin film
scanning electron microscope
plasma etching
high density
intelligent systems
electric field
organic chemistry
real time
data sets
clustering algorithm
three dimensional
decision support
monitoring system