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Mechanical stress effects on electrical breakdown of freestanding GaN thin films.

Tun WangBaoming WangAman HaqueMichael SnureEric HellerNicholas Glavin
Published in: Microelectron. Reliab. (2018)
Keyphrases
  • thin film
  • short circuit
  • grain size
  • high density
  • electrical power
  • electro mechanical
  • database
  • room temperature
  • multi layer
  • white light interferometry
  • machine learning
  • genetic algorithm
  • plasma etching