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Investigation of the implanted phosphorus in a boron doped SiGe epitaxial layer.
R. Kinder
A. Vincze
M. Kuruc
R. Srnánek
B. Lojek
B. Sopko
D. Chren
Published in:
Microelectron. J. (2006)
Keyphrases
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thin film
room temperature
multi layer
high density
solar cell
application layer
chemical vapor deposition
neural network
dual channel
multiple layers
real time
data sets
artificial intelligence
image segmentation
data structure
upper layer