Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators.

Adnan Zaman Abdulrahman Alsolami Ivan F. Rivera Jing Wang

Published in: IEEE Access (2020)

Keyphrases

radio frequency
relevance feedback
high speed
high density
low cost
agent architecture
gallium arsenide
reactive systems
reactive planning
real time
information retrieval
information systems
three dimensional
power consumption
event driven
silicon dioxide