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Self-aligned offset gate poly-Si TFTs using photoresist trimming technology.
Longyan Wang
Lei Sun
Dedong Han
Yi Wang
Mansun Chan
Shengdong Zhang
Published in:
Sci. China Inf. Sci. (2015)
Keyphrases
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thin film
solar cell
high density
multi layer
plasma etching
database
real time
mathematical analysis
databases
wireless sensor networks
supply chain
cost effective
key technologies
field effect transistors
chemical vapor deposition