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The dependency of TSV keep-out zone (KOZ) on Si crystal direction and liner material.

J. ZhangL. ZhangY. DongH. Y. LiCher Ming TanG. XiaChuan Seng Tan
Published in: 3DIC (2013)
Keyphrases
  • data sets
  • artificial intelligence
  • database
  • information retrieval
  • genetic algorithm
  • similarity measure
  • graphical models