A non-destructive technique using 3D X-ray Computed Tomography to reveal semiconductor internal physical defects.

C. H. Tan C. K. Lau

Published in: ICSIPA (2013)

Keyphrases

image reconstruction
defect detection
real world
search engine
internal and external
semiconductor manufacturing
internal structures
data sets
medical images
production line
physical systems
physical objects
defect classification
gallium arsenide