Thermal stress analysis of die stacks with fine-pitch IMC interconnections for 3D integration.
Sayuri KoharaAkihiro HoribeKuniaki SueokaKeiji MatsumotoFumiaki YamadaYasumitsu OriiKatsuyuki SakumaTakahiro KinoshitaTakashi KawakamiPublished in: 3DIC (2011)