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Development of a Broadband (100-240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films.
Marc Duquennoy
Nikolay Smagin
Tahar Kadi
Mohammadi Ouaftouh
Frédéric Jenot
Published in:
Sensors (2022)
Keyphrases
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thin film
high density
three dimensional
high speed
room temperature
film thickness
white light interferometry
databases
software engineering
surface reconstruction
wave propagation
case study
viewpoint
range data
photometric stereo