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Boron-Doped Aluminum Nitride Ferroelectric Field-Effect Transistors with ZnO Semiconductor Channel.
Quyen Tran
John Hayden
Joseph Casamento
Jon-Paul Maria
Thomas N. Jackson
Published in:
DRC (2024)
Keyphrases
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field effect transistors
thin film
high density
room temperature
schottky barrier
semiconductor devices
steady state
mathematical analysis
plasma etching
data center
silicon nitride
data sets
databases