Optimum sampling for track PEB CD Integrated Metrology.

Argon Chen Sean Hsueh Jakey Blue

Published in: CASE (2009)

Keyphrases

random sampling
parameter space
camera calibration
monte carlo
real world
multi agent
sampling methods
real time
process control
single view
markov chain
viewpoint
high dimensional
reinforcement learning
three dimensional
case study
genetic algorithm
machine learning