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Electrical characterization and modeling of thin-film humidity sensors.

A. BonavitaAlina CaddemiNicola DonatoP. AccordinoS. GalvagnoGiovanni Neri
Published in: ICECS (2001)
Keyphrases
  • thin film
  • short circuit
  • data fusion
  • high density
  • monitoring system
  • data acquisition
  • electron microscopy
  • grain size
  • databases
  • database systems
  • expert systems
  • fuzzy logic