ERCN merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems.
MuDer JengXiaolan XieSheng-Luen ChungPublished in: ICRA (2003)
Keyphrases
- manufacturing systems
- manufacturing processes
- petri net
- manufacturing environment
- flexible manufacturing systems
- complex systems
- quality control
- shop floor
- holonic manufacturing systems
- physical processes
- human behavior
- shared memory
- real time
- production cost
- parallel implementation
- manufacturing cell
- cell formation
- process model
- information systems