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Submicrometer Comb-Drive Actuators Fabricated on Thin Single Crystalline Silicon Layer.
Kazunori Takahashi
Erdal Bulgan
Yoshiaki Kanamori
Kazuhiro Hane
Published in:
IEEE Trans. Ind. Electron. (2009)
Keyphrases
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high speed
transmission electron microscopy
high resolution
control system
low cost
liquid crystal
databases
high density
silicon dioxide