Login / Signup

A UV Si-photodiode with almost 100% internal Q.E. and high transmittance on-chip multilayer dielectric stack.

Yasumasa KodaRihito KurodaTaiki NakazawaY. NakaoShigetoshi Sugawa
Published in: Sensors, Cameras, and Systems for Industrial and Scientific Applications (2013)
Keyphrases
  • low cost
  • wide range
  • high density
  • high speed
  • chemical vapor deposition
  • gate insulator
  • data sets
  • visible spectrum