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Measurement of Magnetic Field Distorting the Electron Beam Direction in Scanning Electron Microscope.
Mariusz Pluska
Lukasz Oskwarek
Remigiusz J. Rak
Andrzej Czerwinski
Published in:
IEEE Trans. Instrum. Meas. (2009)
Keyphrases
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magnetic field
electron beam
scanning electron microscope
electromagnetic fields
x ray
integrated circuit
design parameters
eddy current
semiconductor devices
working principle
resonant frequency
phase transition
electron beam lithography
case study