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Silicon nitride tri-layer 1×3 couplers with arbitrary splitting ratio for 3D photonic integrated circuits.
Kuanping Shang
Shaoqi Feng
Guangyao Liu
Siwei Li
S. J. Ben Yoo
Published in:
OFC (2017)
Keyphrases
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integrated circuit
silicon dioxide
multi layer
electron beam
standard deviation
application layer
data sets
information systems
databases
multiscale
thin film
physical characteristics