Low-ESL (<1 pH @ 8.5 GHz) Multi-Terminal Si Capacitor Embedded in 3D Functional Interposer for Power Delivery Network.
Kyosuke KobinataTatsuya FunakiYoshiaki SatakeHitoshi MatsunoSeiji HidakaShunsuke AbeHiroyuki ItoChih-Cheng HsiaoSheng Yi LiYoung-Suk KimTakayuki OhbaPublished in: VLSI Technology and Circuits (2022)