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BEOL-compatible Oxide Semiconductor Devices.

Kaizhen Han
Published in: ICICDT (2023)
Keyphrases
  • semiconductor devices
  • field effect transistors
  • steady state
  • high density
  • electron beam
  • mathematical analysis
  • room temperature
  • fuel cell
  • case study
  • metal oxide
  • high speed
  • fuzzy systems