Yuya Tsukamoto

Publication Activity (10 Years)

Years Active: 2018-2019
Publications (10 Years): 2

Top Topics

Information Retrieval

Process Control

Top Venues

IEICE Trans. Electron.

Publications

Shun'ichiro Ohmi, Yuya Tsukamoto, Rengie Mark D. Mailig
Etching Control of HfN Encapsulating Layer for PtHf-Silicide Formation with Dopant Segregation Process. IEICE Trans. Electron. (6) (2019)
Shun'ichiro Ohmi, Yuya Tsukamoto, Weiguang Zuo, Yasushi Masahiro
PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100) Realized by Dopant Segregation Process. IEICE Trans. Electron. (5) (2018)