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PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100) Realized by Dopant Segregation Process.

Shun'ichiro OhmiYuya TsukamotoWeiguang ZuoYasushi Masahiro
Published in: IEICE Trans. Electron. (2018)
Keyphrases
  • data sets
  • face recognition
  • databases
  • genetic algorithm
  • information systems
  • knowledge base
  • preprocessing
  • hidden markov models
  • knowledge discovery