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Etching Control of HfN Encapsulating Layer for PtHf-Silicide Formation with Dopant Segregation Process.

Shun'ichiro OhmiYuya TsukamotoRengie Mark D. Mailig
Published in: IEICE Trans. Electron. (2019)
Keyphrases
  • process control
  • process model
  • control structure
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  • multiscale
  • design process
  • control theory
  • feedback loop