Yoshihiko Hirai

Publication Activity (10 Years)

Years Active: 1987-1991
Publications (10 Years): 0

Publications

Yoshihiko Hirai, Sadafumi Tomida, Kazushi Ikeda, Masaru Sasago, Masayuki Endo, Sigeru Hayama, Noboru Nomura
Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system). IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 10 (6) (1991)
Yoshihiko Hirai, Masaru Sasago, Masayuki Endo, Kiichiro Tsuji, Yojiro Mano
Process Modeling for Photoresist Development and Design of DLR/sd (Double-Layer Resist by a Single Development) Process. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6 (3) (1987)