Process Modeling for Photoresist Development and Design of DLR/sd (Double-Layer Resist by a Single Development) Process.
Yoshihiko HiraiMasaru SasagoMasayuki EndoKiichiro TsujiYojiro ManoPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1987)
Keyphrases
- development process
- design process
- development processes
- functional requirements
- metamodel
- case study
- software engineering
- systems development
- agent oriented
- development effort
- product development
- software development
- development cycle
- process management
- requirements analysis
- development environment
- design processes
- requirements engineering
- modeling language
- application development
- software application
- conceptual design
- software development processes
- engineering design
- product design
- design principles
- design rationale
- requirements elicitation
- model driven
- user interface
- open source
- software projects
- software requirements
- software design
- requirements specification
- artificial intelligence
- development projects
- game development
- planning process
- human factors
- integrated circuit
- life cycle
- computer aided
- information technology
- decision making