Sigeru Hayama

Publication Activity (10 Years)

Years Active: 1991-1991
Publications (10 Years): 0

Publications

Yoshihiko Hirai, Sadafumi Tomida, Kazushi Ikeda, Masaru Sasago, Masayuki Endo, Sigeru Hayama, Noboru Nomura
Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system). IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 10 (6) (1991)