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Weiguo Su
Publication Activity (10 Years)
Years Active: 2014-2018
Publications (10 Years): 3
Top Topics
Semiconductor Manufacturing
Collaborative Environment
Dynamic Characteristics
Simulation Tools
Top Venues
NEMS
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Publications
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Kai Gao
,
Qiyuan Zhang
,
Weiguo Su
,
Wei Zhang
Patterned Al-Ge Wafer Bonding for Reducing In-Process Side Leakage of Eutectic.
NEMS
(2018)
Xuan Cao
,
Yufeng Chen
,
Kaisi Xu
,
Weiguo Su
,
Wei Zhang
Research on a novel calibration method for high-g accelerometers.
NEMS
(2017)
Kaisi Xu
,
Ningli Zhu
,
Shan Cao
,
Weiguo Su
,
Wei Zhang
,
Yilong Hao
Design and simulation of MEMS thermal and vibration isolator based on PDMS beam arrays.
NEMS
(2016)
Kaisi Xu
,
Ningli Zhu
,
Qingying Zhan
,
Weiguo Su
,
Wei Zhang
,
Yilong Hao
Design and simulation of micro-platform for MEMS devices applied in shock environment.
NEMS
(2015)
Lei Li
,
Kangfa Deng
,
Wen Xia
,
Ningli Zhu
,
Song Li
,
Weiguo Su
,
Wei Zhang
A convenient wafer level bonding based on unpatterned BCB.
NEMS
(2014)