Design and simulation of MEMS thermal and vibration isolator based on PDMS beam arrays.

Kaisi Xu Ningli Zhu Shan Cao Weiguo Su Wei Zhang Yilong Hao

Published in: NEMS (2016)

Keyphrases

information systems
expert systems
building blocks
engineering design
simulation software
simulation tools
mathematical model
design principles
design tools
cross section
dynamic characteristics