Login / Signup
S. Mutas
Publication Activity (10 Years)
Years Active: 2012-2012
Publications (10 Years): 0
Top Topics
Field Effect Transistors
Computationally Efficient
High Robustness
Website
Top Venues
ICICDT
</>
Publications
</>
D. H. Triyoso
,
V. Jaschke
,
Jeff Shu
,
S. Mutas
,
Klaus Hempel
,
Jamie K. Schaeffer
,
Markus Lenski
Robust PEALD SiN spacer for gate first high-k metal gate integration.
ICICDT
(2012)