Jeff Shu

Publication Activity (10 Years)

Years Active: 2012-2013
Publications (10 Years): 0

Top Topics

Computationally Efficient

High Robustness

Top Venues

Publications

Dina H. Triyoso, Klaus Hempel, Susanne Ohsiek, Jeff Shu, Jamie K. Schaeffer, Markus Lenski
Impact of precursors choice on characteristics of PEALD SiN for spacer applications. ICICDT (2013)
D. H. Triyoso, V. Jaschke, Jeff Shu, S. Mutas, Klaus Hempel, Jamie K. Schaeffer, Markus Lenski
Robust PEALD SiN spacer for gate first high-k metal gate integration. ICICDT (2012)