P. Lehnen

Publication Activity (10 Years)

Years Active: 2005-2007
Publications (10 Years): 0

Publications

Z. Li, Tom Schram, Luigi Pantisano, A. Stesmans, Thierry Conard, S. Shamuilia, V. V. Afanasiev, A. Akheyar, Sven Van Elshocht, D. P. Brunco, W. Deweerd, Y. Naoki, P. Lehnen, Stefan De Gendt, Kristin De Meyer
shifts of Ru gated stacks. Microelectron. Reliab. 47 (4-5) (2007)
U. Weber, M. Schumacher, J. Lindner, O. Boissière, P. Lehnen, S. Miedl, P. K. Baumann, G. Barbar, C. Lohe, T. McEntee
technology for deposition of next generation devices. Microelectron. Reliab. 45 (5-6) (2005)