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Nguyen Hoang Tung
ORCID
Publication Activity (10 Years)
Years Active: 2024-2024
Publications (10 Years): 1
Top Topics
Vector Field
Silicon Dioxide
Query Optimization
Si Sio
Top Venues
Sensors
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Publications
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Nguyen Hoang Tung
,
Heesoo Lee
,
Duy Khoe Dinh
,
Dae-Woong Kim
,
Jin Young Lee
,
Geon Woong Eom
,
Hyeong-U. Kim
,
Woo Seok Kang
Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction.
Sensors
24 (10) (2024)