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N. Siannas
Publication Activity (10 Years)
Years Active: 2017-2017
Publications (10 Years): 1
Top Topics
Film Thickness
Numerical Simulations
Multi Layer
Room Temperature
Top Venues
Microelectron. Reliab.
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Publications
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Matroni Koutsoureli
,
N. Siannas
,
George J. Papaioannou
Temperature accelerated discharging processes through the bulk of PECVD silicon nitride films for MEMS capacitive switches.
Microelectron. Reliab.
(2017)